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High Performance SF6/N2/CF4 gas mixtures SAUDIARABIA

High Performance SF6/N2/CF4 gas mixtures SAUDIARABIA

Chemistry studies of SF6/CF4, SF6/O2 and CF4/O2 gas phase.The investigations were aimed to understand the chemistry behavior of plasmas generated with SF 6 and CF 4 mixtures or mixed separately with O 2. The neutral mass spectrometry analysis showed a high concentration of gas species namely SF 5 + (parent specie = SF 6 ), SF 3 + (SF 4 ), CF 3 + (CF 4 ) and HF + (HF) in SF 6 /CF 4 plasmas, SF 5 + , SF.Cited by: 10

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